Nanopositioning Technologies:Fundamentals and Applications
纳米定位技术：基础与应用
仪器仪表技术售 价：
￥
1524.00
发货周期：外国库房发货，通常付款后3-5周到货
作 者
出版时间
2016年01月07日
装 帧
精装
页 码
409
语 种
英文
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图书简介
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
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